Measure Points File
neoEBV can read the Measure Points File and create the measurement points.
Element
Measure Points File may contain comments, output origin, alignment marks, measure points, measure point groups, conditions for L/S extraction, and execution area.
- OUT-ORIGIN
- MARK
- X, Y, B, A, JX, JY, HX, HY, HB, HS, HL, AREA, <number representing an angle>.
- E, P2P, LSP2P, AREA2P
- MULTI
- LS-COND
- LS-DETECT
- LS-ADD
Elements and Formatting
Comments
Lines prefixed with # are treated as comment lines. The comment line can be inserted anywhere.
# comment
Output Origin
Indicates the origin of the coordinates of the marks and measurement points to be output. If you select Save as Measure Points File from the Measurement Panel title bar menu, all coordinates will be output as relative coordinates from this origin. If the output origin does not exist in the Measure Points File, it will be treated as (0, 0).
<ID> OUT-ORIGIN <x (um)>, <y (um)>
Input Origin
Indicates the origin of the coordinates of the marks and measurement points to be input. If you select Load Measure Points File from the Measurement Panel title bar menu, all coordinates will be input as relative coordinates from this origin. If the input origin does not exist in the Measure Points File, it will be treated as (0, 0).
<ID> IN-ORIGIN <x (um)>, <y (um)>
Alignment Marks
Create alignment mark.
<ID> MARK <x (um)>, <y (um)>
Measurement Point
Create measurement point. The option specified below may contain additional options specific to each measuring mode.
<ID> CD <Direction> <x (um)>, <y (um)> [<Option>] [<Screenshot magnification> <Screenshot name>]
| Item | Description |
|---|---|
| ID | Name of the measurement point |
| Direction | X, Y, B (BOX), A (Auto Angle) JX (Jog horizontal), JY (Jog vertical) HX (Hole horizontal), HY (Hole vertical), HB (Hole BOX) HS (Auto Hole Short), HL (Auto Hole Long) C (Corner Round), V (View) AREA (Area) AREA2P (Area by 2 Points) <Angle number> When “P” is added, it means Pitch. (e.g. XP, 45P) When “PU” is added, it means Pitch Up-Up. (e.g. XPU, 45PU) When “PD” is added, it means Pitch Down-Down. (e.g. XPD, 45PD) When AW is added, it means Assist Width. (e.g. XAW, 45AW) When AS is added, it means Assist Space. (e.g. XAS, 45AS) When TW is added, it means Target Width. (Only X and Y are supported. e.g. XTW) When TS is added, it means Target Space. (Only X and Y are supported. e.g. XTS) When TPU is added, it means Target Pitch Up-Up. (Only X and Y are supported. e.g. XTPU) When TPD is added, it means Target Pitch Down-Down. (Only X and Y are supported. e.g. XTPD) When pitch, assist or target is not specified, the measurement point is automatically judged as Width or Space. JX and JY do not support pitch. |
| Option | TVALUE=<value (um)> : Specify the expected result of the measurement. TTONE=<WIDTH|SPACE> : Specify the expected tone of the measurement. JOG_TOLERANCE=<value (um)> : Specify the size of the step to be ignored at the jog measurement. IGNORE_WIDTH=<value (um)> : Specify the width of the figure (space) to be ignored at the assist measurement. FRAME=<width (um)>,<height (um)> : Display the frame of the specified width and height around the center point of the measurement point. ADDITIONAL_COLUMN="<val1,val2,…>" : Specify the value to be set to the additional column. If the additional column does not exist, it will be ignored. The value of ADDITIONAL_COLUMN must be enclosed in ". SEARCH_WIDTH=<NONE|MIN|MAX> : Specify whether to measure the minimum and maximum width around the specified coordinates. JOG_TYPE=<AVE|MIN|MAX> : Specify type of jog measurement. TARGET_CD=<value (um)> : Specify the target length. TARGET_CD_TOLERANCE=<value (um)> : Specify the tolerance of the target length. |
| Screenshot magnification | The magnification level of the image of the measurement point. |
| Screenshot name | File path to output image of the measurement point. |
Measurement Point with Two Points Specified
You need to specify two coordinates when <Direction> is E (Edge-Edge), P2P (Point-Point), LSP2P (Line Space Point-Point) or AREA2P (Area by 2 Points).
<ID> CD <Direction> <x (um)>, <y (um)> <x (um)>, <y (um)> [<Option>] [<Screenshot magnification> <Screenshot name>]
Measurement Point Group
Specify a measurement point group. <Group ID> is a group of measurement points including multiple measurement points to be created within CD. The <Group ID> must be different from CD. Option can be specified only in EMU mode and LMS mode.
<Group ID> MULTI CD [<Option>]
When creating measurement points in a measurement point group, <Group ID> should be specified instead of CD.
<ID> <Group ID> <Direction> <x (um)>, <y (um)> [<Option>] [<Screenshot magnification> <Screenshot name>]
L/S Detect Conditions
Specify conditions for L/S Detect. L/S Detect options may be specified.
<ID> LS-COND <Tone> <Direction> <Search type> <Width (um)> <Length (um)> <Distance (um)> [L/S Detect option]
| Item | Description |
|---|---|
| ID | Name of this condition |
| Tone | WIDTH (dark) SPACE (clear) AW (Space measurement ignoring small Width part) AS (Width measurement ignoring small Space part) |
| Direction | X (horizontal direction) Y (vertical direction) XY (horizontal and vertical direction) JX (create a horizontal measurement point with jog) JY (create a vertical measurement point with jog) PX (create a polygon measurement point in horizontal direction) PY (create a polygon measurement point in vertical direction) Angle number (*) |
| Search type | ALL (Registers L/S extraction results in random order) NEAREST (Registers L/S extraction results in order of closest to the center of the search area) FARTHEST (Registers L/S extraction results in order of furthest from the center of the search area) LONG (Registers L/S extraction results in order of length perpendicular to the measurement direction) LONG-NEAR (Registers L/S extraction results in order of length perpendicular to the measurement direction and of closest to center of the search area) LONG-FAR (Registers L/S extraction results in order of length perpendicular to the measurement direction and furthest from the center of the search area) |
(*) When specifying L/S detect for slant angle, you can specify the angle error tolerance (measure-lsd-angle-tolerance). However, if the figure size or the tolerance is too large, the extraction may sometimes be incorrect.
L/S Detect Execution
Execute L/S detect. You can specify the condition and the range of the extraction. Additionally measurement mode specific options may be specified.
<ID> CD LS-DETECT <L/S Detect Condition name> <L/S Detect area (um)> [option command]
| Item | Description |
|---|---|
| ID | Prefix of the name of the measurement result created by L/S detect |
| L/S Detect condition name | ID name of the condition used for L/S detect |
| L/S Detect area | L/S Detect range. There are two methods for specification: <Center x coordinate (um)>,<Center y coordinate (um)>,<Range (um)> <Lower left x coordinate (um)>,<Lower left y coordinate (um)>,<Upper right x coordinate (um)>,<Upper right y coordinate (um)> |
Create Measurement Point, and Execute L/S Detect Using Conditions on the Measurement Point
Create a measurement point at the specified coordinates, then extract conditions for L/S detect. If L/S Detect area is specified, then L/S detect is executed.
If L/S Detect area is specified, the options of Measurement Point can be specified.
If L/S Detect area is not specified, L/S Detect option can be specified.
L/S Detect Area is Specified
<ID> CD LS-ADD <Direction> <x (um)>, <y (um)> [<L/S Detect area (um)> [<Option>]]
L/S Detect Area is not Specified
<ID> CD LS-ADD <Direction> <x (um)>, <y (um)> [<L/S Detect option>]
Direction Available for LS-ADD
| Item | Description |
|---|---|
| X | Create a horizontal measurement point. |
| Y | Create a vertical measurement point. |
| JX | Create a horizontal measurement point with jog. |
| JY | Create a vertical measurement point with jog. |
L/S Detect Option
The followings are the options applied when executing L/S Detect. They can be specified in LS-COND and LS-ADD. If an option with the same name is specified in LS-DETECT, the value specified in LS-DETECT is prior.
| Item | Description |
|---|---|
| LSD_COUNT=<num> | Specify the number of measurement points to be extracted. |
| JOG_TYPE=<AVE|MIN|MAX> | Specify the type of jog measurement. |
| JOG_TOLERANCE=<value (um)> | Specify the size of the step to be ignored at the jog measurement. |
| IGNORE_WIDTH=<value (um)> | Speficy the width of a figure (space) to be ignored at the assist measurement. |
Measure Points File Sample
Create Alignment Marks and Measurement Points
# The coordinates of alignment marks and measurement points were output in relative coordinates from the point (10, 10).
Out-Origin OUT-ORIGIN 10, 10
# Input the coordinates of alignment marks and measurement points in relative coordinates from the point (10, 10).
In-Origin IN-ORIGIN 10, 10
# Create a alignment mark.
P_1 MARK 7500, 6500
# Create 0 degree measurement point.
1 CD X 8450, 6700
# Create 45 degree and 90 degree pitch measurement points in the measurement point group.
GROUP_1 MULTI CD
2 GROUP_1 45 8450, 6700
3 GROUP_1 YP 8450, 6700
# Create a measurement point measuring both 0 and 90 degrees and save screenshot at 1/4 times magnification to SS.png.
4 CD B 8450, 6700 4 SS.png
# Create a measurement point with direction perpendicular to the edge nearest to the point.
5 CD A 8450, 6700
# Create measurement points in lines and spaces between any two points.
6 CD LSP2P 8450, 6700 8450, 9700
# Create a measurement point to measure an area of figure on specified point.
7 CD AREA 8450, 6700
# Create measurement points to measure areas of figures in specified area.
8 CD AREA2P 8450, 6700 8450, 9700
Create Measurement Points with Options
# Create a 0 degree measurement point at the maximum width.
1 CD X 8450, 6700 SEARCH_WIDTH=MAX
# Smoothes steps up to 1 um and create a jog measurement point with the maximum width of the original shape as the measuring line segment.
2 CD JX 8450, 6700 JOG_TOLERANCE=1 JOG_TYPE=MAX
# Create a 0 degree measurement point inside space ignoring figures up to 1 um.
3 CD XAW 8450, 6700 IGNORE_WIDTH=1
# Create a 45 degree measurement point inside figure ignoring spaces up to 3 um.
4 CD 45AS 8450, 6700 IGNORE_WIDTH=3
# Create a 0 degree measurement point at a figure of 1 um length.
5 CD XTW 8450, 6700 TARGET_CD=1 TARGET_CD_TOLERANCE=0
# Create a 90 degree measurement point at a space between 0.5 um and 1.5 um in length and close to 1 um.
6 CD YTS 8450, 6700 TARGET_CD=1 TARGET_CD_TOLERANCE=0.5
Create Measurement Points by Finding a Location That Satisfies The Width and Length from the Specified Area
# Register 0 degree measurement points that satisfy the specified conditions of figure width and distance to adjacent figures as extraction condition.
LSD-1 LS-COND WIDTH X ALL W<0.5 1<=L 1<D<2
# Create measurement points in the area 0, 0, 100, 100 using LSD-1 condition.
1 CD LS-DETECT LSD-1 0, 0, 100, 100
# Create measurement points in the area -50, -50, 50, 50 using LSD-1 condition.
2 CD LS-DETECT LSD-1 0, 0, 100
# Create a 0 degree measurement point at polygon where the width of bounding box is less than 1 um in the area 0, 0, 100, 100.
LSD-2 LS-COND WIDTH PX ALL W<1 0<L 0<D
3 CD LS-DETECT LSD-2 0, 0, 100, 100 JOG_TOLERANCE=0.1,0.1 JOG_TYPE=MAX
Register Extract Condition from a Measurement Point Created at Specified Point and Create Measurement Points That Satisfies the Condition
# Create an extraction condition from a 0 degree measurement point at the point (100, 200).
LSD-1 CD LS-ADD X 100, 200
# Create measurement points in the area 0, 0, 500, 500 using LSD-1 condition.
1 CD LS-DETECT LSD-1 0, 0, 500, 500
# Create measurement points in the area -50, -50, 50, 50 using LSD-1 condition.
2 CD LS-DETECT LSD-1 0, 0, 100
# Create an extraction condition from a 90 degree measurement point at the point (100, 200) and create two measurement points using that condition.
LSD-2 CD LS-ADD Y 100, 200 LSD_COUNT=2
3 CD LS-DETECT LSD-2 0, 0, 500, 500
# Create an extraction condition from a 0 degree measurement point at the point (100, 200) and create measurement points in the area 0, 0, 500, 500 using that condition.
LSD-3 CD LS-ADD X 100, 200 0, 0, 500, 520
# Create an extraction condition from a jog measurement point at the point (100, 200) and create two measurement points using that condition.
LSD-4 CD LS-ADD JX 100, 200 LSD_COUNT=2
4 CD LS-DETECT LSD-4 0, 0, 500, 500 JOG_TOLERANCE=1 JOG_TYPE=MAX
# Create an extraction condition from a jog measurement point at the point (100, 200) and create measurement points in the area 0, 0, 500, 500 using that condition.
LSD-4 CD LS-ADD JX 100, 200 0, 0, 500, 500 JOG_TOLERANCE=1 JOG_TYPE=MAX