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Swift data viewing and handling

Useful functions

Intuitive user inteface

Supports various data formats

Supports CD-SEM recipe making (optional)

Release date

Version

OS

Download

2024-01-10

01.15.00

RHEL6 or later

x86_64

(*) Installation of Python 3.6 is required to use Python scripts functionality (01.15.00 or later).
We provide a Python package dedicated to neoEBV.

neoEBV is here!

Created as the successor to our EBV, it retains the reliable drawing engine that has been used for many years, but with UI and scalability enhancements.

Useful functions

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neoEBV was created as the successor to our EBV, and the functions and drawing engine cultivated in EBV have been ported directly to neoEBV. In addition, the UI and scalability have been enhanced to enable asynchronous processing, interactive operations, and flexible resource management.

Swift data viewing
and handling

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neoEBV is a tool that not only displays data at high speed, but also provides various calculations such as area density of figures, shot count, measurements such as line width, measurement between figures, figure search, and many other functions such as cutout figures to GDSII, OASIS or our original file format, and outputting CD-SEM recipes.

Intuitive
and responsive UI

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neoEBV is designed to be stress-free for the user. The GUI is not only intuitive, but also supports a wide range of user operations, such as suspending processing and creating automation using an original scripting language.

Supporting various
data formats

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neoEBV supports a variety of formats. Supported formats are GERBER, GDSII, HL, JEOL, MBF, MEBES, MIC, OASIS™, OASIS.CL, OASIS.MASK, OASIS.MBW, P44MultiFile, VSB and the corresponding jobdecks.

Main Screen

The main screen is used to manipulate the layout data.
It does not just the display data but also many other useful functions for users.

Zoom in/out

User can change the display area of the screen by dragging the mouse or operating the mouse wheel.

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Minimap

The minimap shows a full view of the currently displayed data and the display area of the main screen.
User can also change the display area of the main screen by clicking and dragging the mouse.

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Transform,
Color and Hatch

User can change the layout, hatch and color.

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Transformation and Property

User can add columns to display layout information applied to the data and specified in the job deck, and file information such as file path and file size.

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Shot Count Calculation

neoEBV can estimate the shot count for the VSB writer based on the figures.

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neoEBV can estimate the shot count for writing a mask by dividing rectangles and trapezoids into VSB beam shapes of specified shot size.

The shot size can be specified arbitrarily in the X and Y directions.

Polygons are not supported.

Other Calculations

User can perform a variety of calculations from the main screen.

1. Density

User can calculate the area density of figures.

2. Shot Count

neoEBV can estimate the shot count for the VSB writer based on the figures.

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3. Density Map

neoEBV can calculate not only simple area density of figures but also the gridded map of area density.

4. Vertex Count

User can calculate the number of vertices in the specified region

Boolean Operation

neoEBV can perform Boolean operations on the displayed shapes.

1. OR

2. AND

3. XOR

4. SUB

Available Boolean operations are OR, AND, XOR, SUB and NOT.

Additional license is required to output the Boolean operation results.
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Measurement and Inspection

neoEBV can measure the distance between arbitrary 2 points and the width of any figures.
And neoEBV can also search for a figure or cell at any coordinate.

1. 2p Measure

neoEBV can measure the distance between arbitrary 2 points. And if there is a figure or space between the two points, the width of the figure or space between them is also measured.

2. Auto Measure

neoEBV can measure the figure or space width by specifying a point and an angle.

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Search Figures/Cells

User can get the figure or cell information of the clicked area. For figures, the vertex and record name are displayed. For cells, the cell name and bounding box are displayed.

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Intuitive and Responsive UI

neoEBV is designed to be intuitively operable by default, but by using customization and command execution,
it is possible to operate flexibly according to the situation.

1. Customize

User can freely customize the neoEBV toolbar. The customizations are automatically saved and restored the next time the application is launched. Screen size, pressed buttons, etc. are also automatically saved and restored at the next launch.

2. Intuitive and Responsive UI

User can hover the mouse cursor over buttons, lists, marks created on the screen, or lines to see more information.

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3. Command-based Operation

neoEBV can be run with commands instead of a GUI. The commands support almost everything that can be done with the GUI.