Pattern Match
Pattern Match settings
Add Measurement
Settings for adding measurement points
Add Measurement
When Argument is specified as
<dim>, you can put unit suffix after the value (e.g. 0.1nm).
If no unit suffix is specified, [um] is assumed.
Auto ROI Search Limit
--measure-roi-limit
[<dim>]
(4.0)
Specifies maximum search area when creating ROI.
ROI Size Limit
--measure-roi-size-limit
[<dim>]
(50.0)
Specifies the maximum ROI size.
Group/Name Prefix
--measure-group-prefix
[<str>]
(Site)
Specifies the prefix for measurement points group name.
Group/Grouping Only within/Same FOV Size
--measure-group-same-fov
[<on|off>]
(off)
Specifies whether to only group measurement points with the same FOV size.
Group/Grouping Only within/Same Direction
--measure-group-same-direction
[<on|off>]
(off)
Specifies whether to only group measurement points with the same direction.
Group/Allow for a Single Measurement Point Group
--measure-group-allow-single-point
[<on|off>]
(off)
Specfies whether to allow grouping of single measurement point.
Slantline Recontour/Recontour When Measuring Slant Line
--measure-slantline-recontour
[<on|off>]
(on)
Specifies whether to ignore small bumps when measuring a slant line.
Slantline Recontour/Point Tolerance
--measure-recontour-point-blur
[<dim>]
(1.0)
Specifies allowable error amount of vertex for recontour.
Slantline Recontour/Median Tolerance
--measure-recontour-median-blur
[<dim>]
(0.01)
Specifies allowable error amount of the median point of line for recontour.
2-Stage Jog Rounding Tolerances
--measure-jog-tolerance
[<dim1>,<dim2>]
(0.0,0.0)
<dim1> specifies the tolerance for first jog rounding stage, and <dim2> specifies the tolerance for second jog rounding stage.
Ignore Figures Smaller Than
--measure-ignore-width
[<dim>]
(0.0)
Ignores figures smaller than <dim> when creating measurement point.
Search Width Tolerance
--measure-search-width-tolerance
[<value>]
(10.0)
Specifies the tolerance against length at measurement point when Search Width is set to Min or Max [%].
Target CD Size
--measure-target-cd
[<dim>]
(0.0)
Specifies target CD size for searching measurement points when Tone is set to Target CD Width or Target CD Space.
Tolerance of Target CD Size
--measure-target-cd-tolerance
[<dim>]
(0.0)
Specifies the tolerance of target CD size for searching measurement points when Tone is set to Target CD Width or Target CD Space.
Additional Columns
--measure-additional-column
[<column[:value1[/value2[/...]]]>, ...]
Specifies additional columns to add to Measurement Panel.
Auto Hole Limit
--measure-auto-hole-limit
[<dim>]
(10.0)
Specifies the maximum search area for auto hole direction.
Warn When Specified Point Is on a Figure Edge or Its Extension
--measure-warn-on-edge
[<on|off>]
(off)
Specifies whether to print a warning message when the specified measurement point overlaps with figure edges or its extension.
Measure Points File/Print Only Single Point to Screenshot
--measure-output-image-only-itself
[<on|off>]
(off)
Specifies whether to output only single measurement point to one screenshot.
Area Size Limit
--measure-area-size-limit
[<dim>]
(100.0)
Specifies the maximum search area for 'Area' or 'Area by 2 Points' measurement.
LS Detect/Type
--lsdetect-type
[<all|near|far|long|long-near|long-far>]
(all)
Specifies the detection priority when executing LS Detect.
LS Detect/Tolerance/Angle
--lsdetect-tolerance-angle
[<angle>]
(0.0)
Specifies the angle tolerance when executing LS Detect on slant lines [degree].
When the difference shown in the figure below is less than or equal to the specified value, the angle of pattern is corrected.
LS Detect/Tolerance/Position
--lsdetect-tolerance-position
[<dim>]
(0.0003)
Specfies the tolerance of vertex position when executing LS Detect on slant lines.
When the difference shown in the figure below is less than or equal to the specified value, the pattern is corrected so that each edge of the pattern becomes perpendicular to the specified angle.
LS Detect/Count/Detection Count
--lsdetect-required-count
[<count>]
(0)
Specifies the detection count when executing LS Detect.
LS Detect/Count/Force to Satisfy Detect Count with Overlap
--lsdetect-force-count
[<on|off>]
(off)
Specifies whether to force overlap in order to satisfy the detection count of LS Detect.
LS Detect/Count/Interval Size When Multiple Count in a Figure
--lsdetect-interval-in-figure
[<dim>]
(2.0)
Specifies the measurement interval in <dim> when creating multiple measurement points per figure in LS Detect.
LS Detect/Group Detected Items
--lsdetect-group-type
[<off|single|single-prune|on|prune>]
(off)
Specifies how to group LS Detect results.
LS Detect/Margin
--lsdetect-margin
[<dim>,<dim>]
(0.002,0.0)
Specifies the margins for W/H when creating LS Detect conditions from a measurement point.
LS Detect/Insert Results After Last
--lsdetect-insert-after-last
[<on|off>]
(off)
Specifies whether to insert results of LS Detect with Item at end of measurement point list. When off is specified, the results are inserted after the source measurement point.
Duplicate/Length Tolerance
--measure-duplicate-tolerance
[<value>]
(0)
Specifies the tolerance of Length when duplicating [%].
Duplicate/Search Retry Range
--measure-duplicate-search-around
[<dim>]
(0)
Specifies the range for retrying search after duplication failed.
Screen Display/Name
--measure-item-draw-name
[<on|off>]
(on)
Specifies whether to display measurement point name.
Screen Display/Coordinates
--measure-item-draw-coordinate
[<on|off>]
(off)
Specifies whether to display coordinates.
Screen Display/Length
--measure-item-draw-length
[<on|off>]
(on)
Specifies whether to display measurement length.
Screen Display/Delta Length
--measure-item-draw-delta-length
[<on|off>]
(off)
Specifies whether to display measurement length x/y components.
Screen Display/Angle
--measure-item-draw-angle
[<on|off>]
(off)
Specifies whether to display measurement angle.
Screen Display/Center
--measure-item-draw-center
[<on|off>]
(off)
Specifies whether to display measurement center coordinates.
Last modified April 14, 2026