CD Results File

neoEBV can output measure results to the CD Results File.

CD Results File has three types of lines. They are “Output Origin”, “Alignment Mark”, and “Measure Result”.

Output Origin

This indicates the origin of output coordinates for marks and points. All coordinates are relative values from this origin.

<ID> ORIGIN <x (um)>, <y (um)>

Alignment Marks

This indicates the coordinates of alignment mark.

<ID> MARK <x (um)>, <y (um)>

Measure Results

This indicates the measured result. <x (um)> and <y (um)> are the center point. The actual measured point is written after “#” as a comment.

<ID> <Group name> <Direction> <Measure type> <x (um)>, <y (um)> <Length (um)> [<ROI> <File name> <TVALUE Match result> <TTONE Match result> <Additional columns>]

This indicates the measured result between two points such as “Edge-Edge” and “Point-Point”.

<ID> <Group name> <Direction> <Measure type> <x1 (um)>, <y1 (um)> <x2 (um)>, <y2 (um)> <Length (um)> [<ROI> <ROI2> <File name> <Additional columns>]

Item	Description
ID	Name of the measurement point.
Group name	Group to which the measurement point belongs.
Direction	X, Y <angle> A result of BOX measure is expressed by two lines by using “X” and “Y”. HX, HY D (means Hole BOX) H <angle> “D” is used when a result of Hole BOX measure shows the same length in vertical and horizontal directions. When the length is not the same, the result is expressed by two lines by using “HX” and “HY”. AREA Outputs the measured area (um^2) instead of Length (um).
Measure type	WIDTH, SPACE, PITCH, P2P
ROI	Width and height of ROI. Effective only when specifying --cd-file-cursor=on.
File name	filename="<path>:<layno>:<datatype>" Effective only when specifying --cd-file-with-filename=on.
TVALUE Match result	TVALUE_RESULT=<MATCH|MISMATCH> Effective only when specifying TVALUE in Measure Points File. It shows whether the target value and the measured value are matched or not.
TTONE Match result	TTONE_RESULT=<MATCH|MISMATCH> Effective only when specifying TTONE in Measure Points File. It shows whether the target tone and the measured tone are matched or not.
Additional columns	<column1 name>="<column1 value>" [<column2 name>="<column2 value>" …] Effective only when specifying --cd-file-with-additional-column=on.

Site Information

This indecates site information. <x (um)> and <y (um)> are the center point of boundary boxes of ROIs of all measurement points belonging to the site. Site information is output only when --cd-file-site option is on.

<ID> <x (um)>, <y (um)>

Item	Description
ID	Site name

Example of CD Results File

Out-Origin ORIGIN 0, 0
P_1 MARK 7500, 6500
# (5520, 4190)
1 CD X WIDTH 5517, 4190 834
# (6973, 6836)
2 CD X PITCH 6880, 7038 200
# Site
Site1 341.503,273.695
# (340.43, 273.63)
3 Site1 X WIDTH 340.487,273.63 0.762
# (342.64, 273.76)
4 Site1 X WIDTH 342.646,273.76 0.508