Mark File
Text file containing mark list
Format
About the file format
Mark Location File
CSV file for marks
CD Results File
Text file for measure result
Measure Points File
Text file for measurement point creation
Registration File
Text file for registration measurement point creation
Area File
Text file for specifying area
EBV Text
EBV Text format
Dose Table File
Text file that converts the Dose Index of the specified item to Dose Value
Matching Template Recipe File
Text file for matching template file creation
Area-Value Map CSV File
CSV file in area and value set format
Last modified April 15, 2022