Shot Count
Settings for shot count calculation
Shot Count
When Argument is specified as
<dim>, you can put unit suffix after the value (e.g. 0.1nm).
If no unit suffix is specified, [um] is assumed.
Shot Size
--shot-count-shot-size
[<dim>,<dim>]
(0.35,0.35)
Specifies the shot size in height and width for calculating shot count.
Enable Trapezoid Slit Division
--shot-count-trap-slit-division
[<on|off>]
(off)
Specifies whether to enable slit division of trapezoid for calculating shot count.
Trapezoid Slit Width
--shot-count-trap-slit-width
[<dim>]
(0.1)
Specifies the slit width when dividing a trapezoid for calculating shot count.
Trapezoid Slit Pitch
--shot-count-trap-slit-pitch
[<dim>]
(0.0)
Specifies the slit pitch when dividing a trapezoid for calculating shot count.
Last modified December 9, 2025