Add Measurement

Adding measurement points settings

Add Measurement

When Argument is specified as <dim>, you can put unit suffix after the value (e.g. 0.1nm). If no unit suffix is specified, [um] is assumed.

Auto ROI Search Limit

--measure-roi-limit [<dim>] (4.0)

Specifies maximum search area when creating ROI.

ROI Size Limit

--measure-roi-size-limit [<dim>] (50.0)

Specifies the maximum ROI size.

Group/Name Prefix

--measure-group-prefix [<str>] (Site)

Specifies the prefix for measurement points group name.

Group/Grouping Only within/Same FOV Size

--measure-group-same-fov [<on|off>] (off)

Specifies whether to only group measurement points with the same FOV size.

Group/Grouping Only within/Same Direction

--measure-group-same-direction [<on|off>] (off)

Specifies whether to only group measurement points with the same direction.

Group/Allow for a Single Measurement Point Group

--measure-group-allow-single-point [<on|off>] (off)

Specfies whether to allow grouping of single measurement point.

Slantline Recontour/Recontour When Measuring Slant Line

--measure-slantline-recontour [<on|off>] (on)

Specifies whether to ignore small bumps when measuring a slant line.

Slantline Recontour

Slantline Recontour/Point Tolerance

--measure-recontour-point-blur [<dim>] (1.0)

Specifies allowable error amount of vertex for recontour.

Point Blur

Slantline Recontour/Median Tolerance

--measure-recontour-median-blur [<dim>] (0.01)

Specifies allowable error amount of the median point of line for recontour.

Median Blur

2-Stage Jog Rounding Tolerances

--measure-jog-tolerance [<dim1>,<dim2>] (0.0,0.0)

<dim1> specifies the tolerance for first jog rounding stage, and <dim2> specifies the tolerance for second jog rounding stage.

Ignore Figures Smaller Than

--measure-ignore-width [<dim>] (0.0)

Ignores figures smaller than <dim> when creating measurement point.

Search Width Tolerance

--measure-search-width-tolerance [<value>] (10.0)

Specifies the tolerance against length at measurement point when Search Width is set to Min or Max [%].

Target CD Size

--measure-target-cd [<dim>] (0.0)

Specifies target CD size for searching measurement points when Tone is set to Target CD Width or Target CD Space.

Tolerance of Target CD Size

--measure-target-cd-tolerance [<dim>] (0.0)

Specifies the tolerance of target CD size for searching measurement points when Tone is set to Target CD Width or Target CD Space.

Additional Columns

--measure-additional-column [<column[:value1[/value2[/...]]]>, ...]

Specifies additional columns to add to Measurement Panel.

Auto Hole Limit

--measure-auto-hole-limit [<dim>] (10.0)

Specifies the maximum search area for auto hole direction.

Warn When Specified Point Is on a Figure Edge or Its Extension

--measure-warn-on-edge [<on|off>] (off)

Specifies whether to print a warning message when the specified measurement point overlaps with figure edges or its extension.

Measure Points File/Print Only Single Point to Screenshot

--measure-output-image-only-itself [<on|off>] (off)

Specifies whether to output only single measurement point to one screenshot.

Area Size Limit

--measure-area-size-limit [<dim>] (100.0)

Specifies the maximum search area for 'Area' or 'Area by 2 Points' measurement.

LS Detect/Type

Specifies the detection priority when executing LS Detect.

LS Detect/Tolerance/Angle

--lsdetect-tolerance-angle [<angle>] (0.0)

Specifies the angle tolerance when executing LS Detect on slant lines [degree].

LS Detect/Tolerance/Position

--lsdetect-tolerance-position [<dim>] (0.0003)

Specfies the tolerance of vertex position when executing LS Detect on slant lines.

LS Detect/Count/Detection Count

--lsdetect-required-count [<count>] (0)

Specifies the detection count when executing LS Detect.

LS Detect/Count/Force to Satisfy Detect Count with Overlap

--lsdetect-force-count [<on|off>] (off)

Specifies whether to force overlap in order to satisfy the detection count of LS Detect.

LS Detect/Count/Interval Size When Multiple Count in a Figure

--lsdetect-interval-in-figure [<dim>] (2.0)

Specifies the measurement interval in <dim> when creating multiple measurement points per figure in LS Detect.

LS Detect/Group Detected Items

--lsdetect-group-type [<off|single|single-prune|on|prune>] (off)

Specifies how to group LS Detect results.

LS Detect/Margin

--lsdetect-margin [<dim>,<dim>] (0.002,0.0)

Specifies the margins for W/H when creating LS Detect conditions from a measurement point.

LS Detect/Insert Results After Last

--lsdetect-insert-after-last [<on|off>] (off)

Specifies whether to insert results of LS Detect with Item at end of measurement point list. When off is specified, the results are inserted after the source measurement point.

Duplicate/Length Tolerance

--measure-duplicate-tolerance [<value>] (0)

Specifies the tolerance of Length when duplicating [%].

Duplicate/Search Retry Range

--measure-duplicate-search-around [<dim>] (0)

Specifies the range for retrying search after duplication failed.

Screen Display/Name

--measure-item-draw-name [<on|off>] (on)

Specifies whether to display measurement point name.

Screen Display/Coordinates

--measure-item-draw-coordinate [<on|off>] (off)

Specifies whether to display coordinates.

Screen Display/Length

--measure-item-draw-length [<on|off>] (on)

Specifies whether to display measurement length.

Screen Display/Delta Length

--measure-item-draw-delta-length [<on|off>] (off)

Specifies whether to display measurement length x/y components.

Screen Display/Angle

--measure-item-draw-angle [<on|off>] (off)

Specifies whether to display measurement angle.

Screen Display/Center

--measure-item-draw-center [<on|off>] (off)

Specifies whether to display measurement center coordinates.

Pattern Match

Pattern Match settings

Last modified April 23, 2025