Add Measurement
Adding measurement points settings
Recipe Creation
Measurement recipe creation settings
Recipe Creation
Measure Points File/Output File as CSV Format
--measurefile-as-csv
[<on|off>]
(off)
Specifies whether to output Measure Points File in CSV format.
Measure Points File/Output Bitmap Files with Measure Points File
--measurefile-bmp
[<on|off>]
(off)
Specifies whether to output bitmap files along with Measure Points File. (It is not supported in General mode.)
Measure Points File/Output the Center of Measurement Points
--measurefile-center
[<on|off>]
(off)
Specifies whether to output the center of measurement points to Measure Points File.
Measure Points File/Output FOV Size
--measurefile-fov
[<on|off>]
(off)
Specifies whether to output FOV size to Measure Points File. (It is not supported in General mode.)
Measure Points File/Output LS Detect Condition
--measurefile-lsdetect
[<on|off>]
(off)
Specifies whether to output LS Detect condition to Measure Points File.
Measure Points File/Output File Path
--measurefile-output-path
[<filePath>]
Specifies the output file path for the Measure Points File.
CD Results File/Output Bitmap Files with CD Results File
--cd-file-bmp
[<on|off>]
(off)
Specifies whether to output bitmap files along with CD Results File. (It is not supported in General mode.)
CD Results File/Output Filename with CD
--cd-file-with-filename
[<on|off>]
(off)
Specifies whether to output the filename associated with a CD to CD Results File.
CD Results File/Output ROI Size
--cd-file-roi
[<on|off>]
(off)
Specifies whether to output ROI size to CD Results File.
CD Results File/Output Alignment Mark
--cd-file-alignment
[<on|off>]
(on)
Specifies whether to outut alignment mark to CD Results File.
CD Results File/Output Measurement Point
--cd-file-measurement
[<on|off>]
(on)
Specifies whether to output measurement points to CD Results File.
CD Results File/Output Target Error Measurement Point
--cd-file-error
[<on|off>]
(off)
Specifies whether to output measurement points which had target errors to CD Results File.
CD Results File/Output Measure Error Measurement Point
--cd-file-measure-error
[<on|off>]
(off)
Specifies whether to output measurement points which had measurement errors to CD Results File.
CD Results File/Output Additional Column with CD
--cd-file-with-additional-column
[<on|off>]
(off)
Specifies whether to output additional columns to CD Results File.
CD Results File/Output Site
--cd-file-site
[<on|off>]
(off)
Specifies whether to output site information to CD Results File.
CD Results File/Output File Path
--cd-file-output-path
[<filePath>]
Specifies the output file path for the CD Results File.
Last modified December 27, 2024