Pattern Match
Pattern Match settings
Pattern Match
When Argument is specified as <dim>, you can put unit suffix after the value (e.g. 0.1nm).
If no unit suffix is specified, [um] is assumed.
Dissimilarity Threshold
--matching-matching-dissimilarity-threshold
[<value>]
(0.239)
Specifies the threshold of Pattern Match. The smaller the value of this option is, the more similar the patterns are only matched. When 0 is specified, it only detects patterns that are perfectly matched.
As default, the following patterns are judged to be matched.
Scale Error
--matching-matching-scale-error
[<value>]
(0.1)
Specifies the allowable error rate of scale between all patterns in a template. When the biggest scale is "the smallest scale x (1 + <specified value>)" or less, the patterns are judged to be matched.
Rotate Error
--matching-matching-rotate-error
[<value>]
(1.0)
Specifies the allowable error of rotation angle between all patterns in a template. When the gap between the biggest and the smallest rotate angle is within the specified value, the patterns are judged to be matched.
Angle Error
--matching-matching-angle-error
[<value>]
(5.0)
Specifies the allowable error of the centroid-to-centroid angle between patterns in a template. When the biggest difference of the centroid-to-centroid angles between template patterns and detected patterns is within the specified value, the patterns are judged to be matched.
As a rotation correction, the rotation angle of a detected pattern is added to the template centroid-to-centroid angle used for the evaluation.
Distance Error
--matching-matching-distance-error
[<value>]
(0.2)
Specifies the allowable error rate of the centroid-to-centroid distance between patterns in a template. When the centroid-to-centroid distances between all patterns are "the template centroid-to-centroid distance x (1 - <specified value>)" or more and "the template centroid-to-centroid distance x (1 + <specified value>)" or less, the patterns are judged to be matched.
As a scale correction, the template centroid-to-centroid distance used for the evaluation is multiplied by the scale of a detected pattern.
Scale Range
--matching-matching-scale-range
[<min>,<max>]
(0.9, 1.1)
Specifies the range of scaling factor for Pattern Match.
Area Scale Error
--matching-matching-area-scale-error
[<value>]
(0.01)
Specify the allowable error rate for area of patterns used for filtering input patterns by "Scale Range". Matching is performed only when the input pattern area is within the tolerance ("1 ± Area Scale Error") based on the template pattern area to which "Scale Range" is applied.
The purpose of filtering patterns by area is to improve performance. The pattern scale is determined only by the maximum width of the pattern bounding box.
The large “Area Scale Error” may increase processing time.
Trans/Scale
--matching-matching-trans-scale
[<on|off>]
(on)
Specifies whether to detect patterns which match with scaled templates.
Trans/Mirror
--matching-matching-trans-mirror
[<on|off>]
(on)
Specifies wether to detect patterns which match with mirrored templates. When on is specified, patterns matched with mirroring around X axis can be detected.
Trans/Rotate
--matching-matching-trans-rotate
[<on|off>]
(on)
Specifies whether to detect patterns which match with rotated templates. When on is specified, patterns matched with rotations of 90, 180, or 270 degrees can be detected.
Line Size
--matching-matching-line-size
[<dim>]
(0.002)
Specifies the output width of a polygon detected as a line or a polyline. If the line is a diagonal line, the output is widened by the specified size in the X-axis or Y-axis direction so that it becomes a trapezoid.
Last modified March 14, 2025
