File List
The opened file will be added to this panel. Toggle display on/off for each chip and layer, and change transform such as mirror and rotation.
Screen and Operation
How to operate neoEBV
Screen Overview
Mini Map
Displays the whole area and the orientation of all open files. It also shows the area that is currently displayed on the screen.
Screen
The screen area displays the figures of open files. It has various functions such as Zoom in/out the display area, showing figure and cell information, figure measurement, addition of marks, calculation of aperture ratio (density), and calculation of shot count.
Inspection Panel
Displays selected figures, cell information, and measurement information.
Mark Panel
Displays a list of marks added to the screen.
Calculation Panel
Displays the list of calculation results such as pattern density, shot count, etc. calculated on the screen.
Measurement Panel
You can perform Line/Space measurement of figures. You can also create a measurement recipe that can be used with the CD-SEM system (requires optional license).
Matching Template Panel
You can create a template file to be input into pattern-match.
Console Panel
Display messages, and logs.
Python Panel
You can execute Python scripts and manipulate neoEBV.
Note Panel
You can fill in the memo freely.
Help Panel
Display how to use mouse operations and keyboard shortcuts.
About Dialog
Display the version of neoEBV, the software license agreement, the libraries used by neoEBV, and the license.
Toolbar
Show the whole menu, show the preference dialog, and show/hide the panel.
Status Bar
Displays progress, mouse position, neoEBV internal communication status, and memory usage.
Auto Navigation Bar
Controls an auto-navigation function that traverses items in a datalist.
Plugin
Add functionality to neoEBV using a Python script
Last modified December 15, 2023