Supported Formats
Displayable Pattern File Format
| Format | Version | Corresponding Jobdeck |
|---|---|---|
| GDSII | Release 6.0 | |
| OASIS® 1 | SEMI P39-1105 P39-0416 | |
| OASIS.CL (SEMI P49) | SEMI P49-0823 | |
| OASIS.MASK | SEMI P44-1105, SEMI P44-0709 P44-1216 | Maly (SEMI P45-0306N, SEMI P45-1218) |
| MEBES | JB, Extended MEBES Jobdeck | |
| JEOL | JDK, JDF | |
| HL | Lot, JTX | |
| MIC | Maskset | |
| GERBER | Extended GERBER Format 2 | |
| P10 | semi p10-0706e | |
| EBV Text | See appendix | |
| MBF | MDS | |
| MBW | ||
| P44MultiFile | ||
| VSB | MDS |
neoEBV does not support files with addresses below 0.1pm.
neoEBV does not support files whose filepath includes a multi byte character.
The input/output of various CD-SEM and Metrology measurement recipe formats are also supported.
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OASIS® is a registered trademark of Thomas Grebinski and is licensed for use by SEMI, San Jose, California
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Barco Graphics N.V., Gerber RS-274X Format User’s Guide, Part Number 414 100 014 Rev D March, 2001
Last modified December 23, 2024