License

Free Edition

• Available Formats

  EBV TEXT

  GDSII

  GERBER

  OASIS®

  OASIS.CL (SEMI P49)

  OASIS.MASK

• Available Functions

  Display Various Items (*1)

  Search Various Items (*2)

  Calculate Various Items (*3)

  2points Measurement

  Suspend & Resume

  Snap

  Multi Screens and Sync Screens

  Highlight Layer

  Save/Load Cache

  Add Mark

  Notes

  Measurement Point Creation (*4)

  Decoding Barcode

  Screen Sharing

  Boolean Operation (*5)

Photomask Edition

• Available Formats

  Free Edition Format

  HL

  JEOL

  MBF

  MEBES

  MIC

  OASIS.MBW

  P44MultiFile

  VSB

  Corresponding Jobdecks

• Available Functions

  Free Edition Functions

  Cutout Figures (GDSII, OASIS®, EBV_TEXT)

  Output Calculation Results (*3)

  Measurement Recipe Creation (*4)

  Headless Execution

  GUI Operation by JSON RPC command through port connection

  Command File Driven

(*1) Figures Display, Chip Line Display, Cell Line Display, Dose Index Display, Axis Display, Grid Display, Ruler Display
(*2) Figures Search, Cell Search
(*3) Density Calculation, Figure Count, Vertex Count, these Calculation for meshed area and Shot Count Calculation
(*4) Measurement Point Creation function related to Measurement Recipe Creation requires Photomask Edition or Optional Functions license.
(*5) Output of the result of boolean operation is optional function.