License

neoEBV has 2 license types Free Edition and Photomask Edition and the following Optional Functions license.
We can provide Photomask Edition license and various license of Optional Functions for evaluation.
Please contact us from "Contact" at the bottom of this page if you are interested.

Free Edition

  • Available Formats

    EBV TEXT

    GDSII

    GERBER

    OASIS®

    OASIS.CL (SEMI P49)

    OASIS.MASK

  • Available Functions

    Display Various Items (*1)

    Search Various Items (*2)

    Calculate Various Items (*3)

    2points Measurement

    Suspend & Resume

    Snap

    Multi Screens and Sync Screens

    Highlight Layer

    Save/Load Cache

    Add Mark

    Notes

    Measurement Point Creation (*4)

    Decoding Barcode

    Screen Sharing

    Boolean Operation (*5)

Photomask Edition

  • Available Formats

    Free Edition Format

    HL

    JEOL

    MBF

    MEBES

    MIC

    OASIS.MBW

    P44MultiFile

    VSB

    Corresponding Jobdecks

  • Available Functions

    Free Edition Functions

    Cutout Figures (GDSII, OASIS®, EBV_TEXT)

    Output Calculation Results (*3)

    Measurement Recipe Creation (*4)

    Headless Execution

    GUI Operation by JSON RPC command through port connection

    Command File Driven

(*1) Figures Display, Chip Line Display, Cell Line Display, Dose Index Display, Axis Display, Grid Display, Ruler Display
(*2) Figures Search, Cell Search
(*3) Density Calculation, Figure Count, Vertex Count, these Calculation for meshed area and Shot Count Calculation
(*4) Measurement Point Creation function related to Measurement Recipe Creation requires Photomask Edition or Optional Functions license.
(*5) Output of the result of boolean operation is optional function.

Optional Functions

neoEBV supports creating, loading and saving of CD-SEM recipe.
neoEBV can create recipes not only via GUI but also command line with text file
which includes measurement coordinate and direction.
Please contact us from "Contact" at the bottom of this page if you are interested.

Advantest CD-SEM recipe creation

  • Save/Load Measurement Recipe

  • Add Measurement Point by GUI

  • Create Measurement Points from Text File

  • Measurement Cursor Auto Adjustment

  • Create Measurement Points for Figure with Jogs

  • Create Measurement Points without Assist Figures

  • Auto Grouping Measurement Points to Single Site

Holon CD-SEM recipe creation

  • Save/Load Measurement Recipe

  • Add Measurement Point by GUI

  • Create Measurement Points from Text File

  • Measurement Cursor Auto Adjustment

  • Create Measurement Points for Figure with Jogs

  • Create Measurement Points without Assist Figures

  • Auto Grouping Measurement Points to Single Site